Flexible manifold for integrated gas system gas panels

ABSTRACT

A flexible gas delivery apparatus having a gas panel with a first extension block having a first section and second section, the first section positioned between a mixing valve and the substrate having an exit port in fluid communication with a pump/purge manifold, and a second extension block having a first section and a second section, the first section positioned between a purge valve and the substrate having a discharge port in fluid communication with a mixing manifold, wherein the second portion of the first and second extension blocks extend outwardly from the gas panel.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a divisional of and claims priority under 35 U.S.C.§120 to U.S. patent application Ser. No. 11/761,326 filed on Jun. 11,2007 and entitled “Flexible Manifold For Integrated Gas System GasPanels” which is incorporated by reference herein for all purposes.

FIELD OF THE INVENTION

The present invention relates to gas delivery systems. Moreparticularly, the present invention relates to a flexible manifold forgas delivery systems. Even more particularly, the present inventionrelates to a flexible manifold for integrated gas system (IGS) gasdelivery systems.

BACKGROUND OF THE INVENTION

FIG. 1 illustrates a conventional semiconductor etch processing system100. The conventional semiconductor etch processing system 100 includesa gas source 102, a gas delivery panel 104 connected to the gas source102 via gas supply lines 106, and a processing chamber 108 connected tothe gas delivery system 104. The gas delivery panel 104 further includesgas sticks 110 coupled to the gas supply lines 106. The gas sticks 110are a series of gas distribution and control components such as a massflow controller, one or more pressure transducers and/or regulators, aheater, one or more filters or purifiers, and shutoff valves. Thecomponents used and their particular arrangement in a gas stick can varydepending upon their design and application, with many componentarrangements being known in the art. In a typical semiconductorprocessing arrangement, over seventeen gases are connected to thechamber via gas supply lines 106, gas distribution components andsubstrates, mixing manifold. These are attached to a base plate forminga complete system known as “gas panel” or “gas box”.

The conventional semiconductor etch processing system 100 depends on theuse of several hazardous and non-hazardous processing gases andcarefully measured delivery of over seventeen gases from the gas source102 to the processing plasma chamber 108 via the gas supply lines 106 ina synchronized mode. Such systems usually require gas delivery panel 104for coupling high purity gases for semiconductor etch processing systemsor other thin film coating processes.

In semiconductor manufacturing, processes have become increasinglyintolerant of particle contamination as the dimensions of semiconductordevices decrease and there is less room to accommodate more components.One source for particle contamination is the gas stick itself thatdelivers gases from the source of high purity gases to the semiconductorprocessing chamber where such particle contaminants commonly getdeposited onto the semiconductor devices that are being processed.Another source for particle contamination is the exposure of componentsin a gas delivery system to room air during maintenance and repair ofindividual gas delivery components.

One approach to eliminating connection parts, such as tubing andcouplers, facilitating maintenance of the components of the gas stick,and to reduce contamination is to “down mount” the components onmultiple manifold blocks and then onto a base plate. These are alsoknown as IGS or surface mounted gas delivery systems. However, eachcomponent of a gas stick typically comprises highly machined parts,making each component relatively expensive to manufacture and replace.When a component fails, the entire component is replaced even though inmost instances the failure is mechanical (and in the case of a mass flowsensor, it is the sensor that usually fails). Each component istypically constructed with a mounting block, which in turn is made withmultiple machine operations, making the component expensive. Thus, whiledown mounting the component parts on multiple fixing blocks solves oneproblem, it still is relatively expensive to replace defective parts.

Furthermore, gas panels are typically manufactured with three or moregas sticks since manufacturing less gas sticks is expensive, difficultto mount in the gas cabinet, and uses additional parts that may not benecessary to use. Thus, a user has no option other than having a setnumber of gas sticks. The minimum number of gas sticks is 6 and thestandard number of gas sticks is 9. Gas panels having 12 or 16 sticksare possible. However, if a user has a 9 gas stick gas panel installedand wants to add one or two additional gas sticks, the user would berequired to buy a gas panel having a minimum of at least three gassticks. There is no efficient method of connecting a single gas stick tothe existing gas panels without removing the entire gas panel, riskingcontamination, and/or using additional manual effort and time to removeand reinstall the gas delivery components.

Alternatively, should the user have a 9 gas stick gas panel installedand later only needs to use 7 gas sticks, 2 gas sticks would not be usedon the gas panel. This would result in excess parts of the gas panelthat is not used and removal of the excess gas sticks from the gas panelwould not be possible. This situation creates “dead-leg”, a section ofconduit or manifold through which gas does not flow. Dead-leg isconsidered to be a source of contamination.

BRIEF DESCRIPTION OF THE INVENTION

A flexible gas delivery apparatus having a gas panel with a firstextension block having a first section and second section, the firstsection positioned between a mixing valve and the substrate having anexit port in fluid communication with a pump/purge manifold, and asecond extension block having a first section and a second section, thefirst section positioned between a purge valve and the substrate havinga discharge port in fluid communication with a mixing manifold, whereinthe second portion of the first and second extension blocks extendoutwardly from the gas panel.

In another embodiment, the flexible gas delivery apparatus may have amanifold extension block with a plurality of input ports, each pluralityof input ports in fluid communication with the substrate, a horizontalcommon manifold pathway, a plurality of output ports, each plurality ofoutput ports in fluid communication with the common manifold pathway;and a plurality of vertical tube ports configured to receive a tube,each of the plurality of vertical tube ports positioned substantiallybetween each of the plurality of input ports, each of the vertical tubeports in fluid communication with the common manifold pathway.

These and other features will be presented in more detail in thefollowing detailed description of the invention and the associatedfigures.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated into and constitute apart of this specification, illustrate one or more embodiments and,together with the detailed description, serve to explain the principlesand implementations of the invention.

In the drawings:

FIG. 1 illustrates a conventional semiconductor etch processing system.

FIG. 2 illustrates an exemplary gas stick.

FIGS. 3A, 3B, 3C and 3D illustrate exemplary manifold blocks.

FIGS. 4A-4D illustrate an embodiment of manifold extension block.

FIGS. 5A and 5B illustrates yet another embodiment of an extensionblock.

FIG. 6 illustrates the extension blocks in use with an IGS gas deliverysystem.

FIGS. 7A and 7B illustrate yet another embodiment of an extension block.

FIG. 8 illustrates a side view of one end of an exemplary gas panel.

FIG. 9 is a schematic view of an exemplary gas feed device forsemiconductor processing.

DETAILED DESCRIPTION

The present invention will now be described in detail with reference toa few preferred embodiments thereof as illustrated in the accompanyingdrawings. In the following description, numerous specific details areset forth in order to provide a thorough understanding of the presentinvention. It will be apparent, however, to one skilled in the art, thatthe present invention may be practiced without some or all of thesespecific details. In other instances, well known process steps and/orstructures have not been described in detail in order to notunnecessarily obscure the present invention.

The present invention provides for a flexible gas delivery manifold.FIG. 2 illustrates an exemplary gas stick. Although illustrated withcertain components, the specific components are not intended to belimiting as different components may be used and/or less or morecomponents may be used to form the gas stick. Additionally, althoughdescribed with a single gas stick, the number of gas sticks is notintended to be limiting. As discussed above, a plurality of gas sticks,form a gas box or panel. In an embodiment, the valve on the componentsis an integrated surface mount valve. In general, an integrated surfacemount component is a gas control component (e.g., valve, filter, etc.)that is connected to other gas control components through channels on asubstrate assembly, upon which the gas control components are mounted.This is in contrast to gas control components that are generallyattached through bulky conduits with VCR attachments (vacuum coupledring).

The gas stick 200 may have a gas stick input port 202 to input a supplygas. A manual valve 204 may be used for carrying out the supply orisolation of the supply of supply gas. The manual valve 204 may alsohave a lockout/tagout device 206 above it. Worker safety regulationsoften mandate that plasma processing manufacturing equipment includeactivation prevention capability, such as a lockout/tagout mechanism.Generally a lockout is a device that uses positive means such as a lock,either key or combination type, to hold an energy-isolating device in asafe position. A tagout device is generally any prominent warningdevice, such as a tag and a means of attachment that can be securelyfastened to energy-isolating device in accordance with an establishedprocedure.

A regulator 208 may be used to regulate the gas pressure or the supplygas and a pressure gauge 210 may be used to monitor the pressure of thesupply gas. In one embodiment, the pressure may be preset and not needto be regulated. In another embodiment, a pressure transducer (notillustrated) having a display to display the pressure may be used. Thepressure transducer may be positioned next to the regulator 208. Afilter 212 may be used to remove impurities in the supply gas. A primaryshut-off valve 214 may be used to prevent any corrosive supply gassesfrom remaining in the gas stick. The primary shut-off valve 214 may betwo-port valve having an automatic pneumatically operated valve assemblythat causes the valve to become deactivated (closed), which in turneffectively stops plasma gas flow within the gas stick. Oncedeactivated, a non-corrosive purge gas, such as nitrogen, may be used topurge the gas stick. The purge valve 216 may have three-ports to providefor the purge process—an entrance port, an exit port and a dischargeport.

Adjacent the purge valve 216 may be a mass flow controller (“MFC”) 218.The MFC 218 accurately measures the flow rate of the supply gas.Positioning the purge valve 216 next to the MFC 218 allows a user topurge any corrosive supply gasses in the MFC 218. A mixing valve 220next to the MFC 218 may be used to control the amount of supply gas tobe mixed with other supply gasses on the gas panel.

Each component of the gas stick may be positioned above a manifoldblock. A plurality of manifold blocks form a substrate 222, a layer ofmanifold blocks that creates the flow path of gasses through the gasstick 200. The gas delivery components may be positioned on the manifoldblocks by any known means such as with a pressure fitting sealant (eg.,C-seal) and the like.

FIGS. 3A, 3B, 3C and 3D illustrate exemplary manifold blocks. Referringto FIG. 3A, manifold block 300 may have component ports 302 configuredto receive gas stick components. The manifold block 300 may be coupledto a base plate via apertures 304 a, 304 b, 304 c, 304 d. A plurality ofmanifold blocks may be removably coupled to each other via manifoldconnector 306 to form a substrate. Thus, although illustrated with onemanifold block, the number is not intended to be limiting as any numberof manifold blocks may be used as necessary. The manifold block may beformed from a stainless steel material such as 316L vacuum inductionmelting or vacuum arc re-melting stainless steel.

FIG. 3B illustrates a cut-away view of FIG. 3A. Gas passageways may beprovided in each of the manifold blocks to fluidly connect each of thegas stick components. The gas passageway may be a horizontal passageway.However, as illustrated below, the passageway may be formed with a “V”,“U” or any other shape.

FIG. 3C illustrates another exemplary manifold block. Manifold assembly2 may be mounted on a base plate 7 by combining individual manifoldblocks to form an operative system. Each of the three manifold blocks 4may be formed from a stainless steel material such as 316L vacuuminduction melting or vacuum arc re-melting stainless steel. Althoughillustrated with three manifold blocks, the number is not intended to belimiting as any number of manifold blocks may be used as necessary. Gaspassageways may be provided in each of the manifold blocks and as shownin FIG. 3C, the passageways may have access ports positioned on a commonupper surface 38. For ease of description, the flow path will beconsidered to extend from left to right although it could just as easilybe reversed and, accordingly, the entrance port 6 is shown on the uppersurface 38 along with an exit port 8. The entrance port 6 may bepartially on an upper flange member 10 that is cantilevered from acentral manifold body portion 12. A lower flange member 14 may bedimensioned to have a complimentary configuration to match the upperflange member 10 of the immediately adjacent manifold block. Each of thegas delivery components illustrated in FIG. 2 may be bridged across anentrance port 6 on one manifold block 4 to an exit port 8 on theadjacent manifold block 4. While not shown in any of the drawings of thepresent application, the gas stick may be mounted in a sealed housingfor safety purposes and to control the purging of any leaking gases fromthe gas delivery system.

Referring to FIG. 3D, V-shaped gas passages between an entrance port 6and an exit port 8 may be seen in the phantom lines. Althoughillustrated as V-shaped, any shape may be used such as U-shaped passagesas illustrated below. A pair of appropriate boreholes 16 and 18 on anupper flange member 10 may have a lower beveled surface to enableself-aligning of any bolt fasteners. The respective bores 16 and 18appropriately align with threaded apertures 20 and 22 on the lowerflange member 14 of an adjacent manifold block.

A pair of threaded bores 24 and 26 and 28 and 29 may be provided on eachperimeter side to enable the fastening of a flange on a gas stickcomponent. Finally, a pair of recesses 30 and 32 on opposite sides mayalso be provided to accommodate any protrusion of screws for fastening apressure sealer to the bottom of a gas stick component. The bore opening16 and 18 may have sufficient depth that when an appropriate fastener issealed, there may be sufficient vertical room above a fastener toaccommodate the protruding head of any fastening screw or boltassociated with the pressure sealer.

Again, as seen in FIGS. 3C and 3D, apertures 34 and 36 may be providedon either side of the lower flange members 14 to thereby accommodate afastener 31 for attachment to the base plate 7. The upper flange member10 may be appropriately tapered or cut to facilitate access, forexample, by an Allen wrench, to any such fasteners 31.

Thus, a plurality of manifold blocks 4 may have specific upper flangemembers 10 and lower flange members 14 that are cantilevered from acentral manifold body portion 12 to enable the individual manifoldblocks to be interconnected to accommodate a specific fluid distributionsystem. Each of the manifold blocks 4 may have a fluid passageway withan entrance port 6 and an exit port 8 that access a common upper surface38. The dimensions of the upper flange member 10 and the lower flangemember 14 may be such that they extend across each other and therebyprovide means for removably interlocking a pair of adjacent manifoldblocks 4 to operatively permit their respective fluid passageways to bepositioned for interconnection.

Referring back to FIG. 2, as stated above, the lower surface of thesubstrate 222 may be removably coupled to a base plate 7. The substrate222 may have a plurality of fluid passageways 228 a, 228 b in fluidcommunication with a pump/purge manifold 224 and a mixing manifold 226on top of the base plate 7. The pump/purge manifold 224 may be used topurge corrosive gasses from the gas stick 200. The mixing manifold 226may be in fluid communication with the mixing valve and used to mix thegases in any quantity desired by a user.

As stated above, single gas sticks are expensive to manufacture,difficult to mount in the gas cabinet, and uses additional parts thatmay not be necessary to use which may lead to contamination. However,with an extension block, single gas sticks may be joined to an existinggas panel efficiently and quickly. The use of the extension block makesjoining a single gas stick less expensive, easy to mount in the gascabinet, and does not use excess parts. The extension block may bepositioned to operatively permit their respective fluid passageways tobe positioned for interconnection with the pump/purge manifold 224 andthe mixing manifold 226. Thus, only the purge and mixing valves need tobe removed when joining a single gas stick.

FIGS. 4A-4D illustrate an embodiment of manifold extension block.Referring now to FIG. 4A and 4B, an embodiment of a manifold extensionblock having two ports. The extension block 400 may be a single machinedblock having a first section 402 and a second section 404. Althoughillustrated with only two sections, the number of sections is notintended to be limiting as the extension block may manufactured to havea longer length and a plurality of sections to join a plurality ofsingle gas sticks.

For exemplary purposes only and not intended to be limiting, thetwo-port manifold extension block 400 will be discussed in use with themixing valve. The manifold extension block 400 may have a plurality ofapertures 406 a, 406 b, 406 c, 406 n (where n is an integer) toremovably couple the mixing valve to the extension block 400 and theextension block 400 to the base plate 7 (See FIG. 2). The extensionblock 400 may have an entrance port 408 and an exit port 414. Theentrance port 408 may be in fluid communication with one of the gasdelivery components, such as the MFC and it respective manifold block,via horizontal passageway 412 to receive the supply gas from the MFC.The exit port 414 may extend vertically through fluid passageway 228 bin the substrate 222 so that it is in fluid communication with themixing manifold 226. The exit port 414 may be in fluid communicationwith a horizontal passageway 416 which may form a secondary mixingmanifold. The exit port 414 may also be in fluid communication withdischarge port 418 to remove any unnecessary gasses. It will now beknown that any of the horizontal fluid passageways may be removablysealed or plugged when not in use. For example, if discharge port 418 isnot in use, the port may be plugged so that there will be less dead legin the gas stick. In another example, if the user does not want the exitport 414 to extend vertically into the fluid passageway 228 b in thebase plate 7(See FIG. 2), the user may simply plug the exit port 414 toprevent gasses from entering fluid passageway 228 b.

FIGS. 4C and 4D illustrate another embodiment of an extension blockdescribed in use with the purge valve. The extension block 450 may be asingle machined block having a first section 403 and a second section405. Although illustrated with only two sections, the number of sectionsis not intended to be limiting as the extension block may manufacturedto have a longer length and a plurality of sections to join a pluralityof single gas sticks. The extension block 450 may have three ports—anentrance port 408, exit port 414, and discharge port 420. The entranceport 408 may be in fluid communication with one of the gas deliverycomponents, such as the primary shut-off valve and it respectivemanifold block, via horizontal fluid passageway 412. Exit port 414 maybe in fluid communication with the MFC via horizontal fluid passageway422. Discharge port 420 may extend vertically downward to be in fluidcommunication with fluid passageway 228 a in the substrate 222, which isin fluid communication with the pump/purge manifold 224. Discharge port420 may also be in fluid communication with a horizontal passageway 424which forms a secondary pump/purge manifold.

FIGS. 5A and 5B illustrates yet another embodiment of an extensionblock. FIG. 5A illustrates a two port manifold extension block 500 andFIG. 5B illustrates a three port manifold extension block 502. Theextension blocks illustrated in FIG. 5A and 5B are similar to theextension blocks described in FIGS. 4A-4D. However, the extension blocksillustrated in FIGS. 5A and 5B may not be made of one single machinedpiece. The extension blocks may be connected via horizontal fluidpassageway 504. Thus, unlike the one-piece extension block illustratedin FIGS. 4A-4D, these embodiments gives a user flexibility to connect asmany extension blocks as needed. The horizontal fluid passageways 504may be connected through any means known to prevent any gas leakage.

FIG. 6 illustrates the extension blocks in use with an IGS gas deliverysystem. In one embodiment as illustrated, a purge manifold 602 and amixing manifold 604 may be placed within the base plate 606 parallel toeach other. In another embodiment as illustrated in FIG. 2, the purgemanifold 602 and the mixing manifold 604 may be placed on top of thebase plate 7. In either embodiment, the pump/purge manifold 602 and/orthe mixing manifold 604 may be any means to allow for the flow ofgasses, such as a tubing and the like. The pump/purge manifold 602 andthe mixing manifold 604 may have a plurality of apertures 614 to be influid communication with a second plurality of apertures 612 in thesubstrate 608. The substrate 608 may be coupled to the base plate by anconnecting means such as a screw, and the like. A first section 650 ofthe purge manifold extension block 660 may be removably coupled on thesubstrate 608 with a pressure sealer 622. The discharge port 616 may bein fluid communication with one of the second plurality of apertures 612in the substrate 608. This allows the discharge port 616 to be in fluidcommunication with the pump/purge manifold 602 on the base plate 606.The purge valve 620 may be placed above the purge manifold extensionblock 660. The purge valve 620 may be secured to the purge manifoldextension block 660 with a pressure sealer 622. Any fastening means,such as screws 624, may be used to secure the purge valve 620 to thebase plate 606. The second section 654 of the purge manifold extensionblock 660 may extend outwardly from the substrate 608 and configured toreceive additional gas components.

The first section of a mixing manifold extension block 630 may besimilarly coupled to the gas panel. The first section 652 of the mixingmanifold extension block 630 may be positioned on the upper surface 610of the substrate 608 with a pressure sealer 622. The exit port 632 maybe in fluid communication with one of the second plurality of apertures612 in the substrate 608. This allows the exit port 632 to be in fluidcommunication with the mixing manifold 604 on the base plate 606. Themixing valve 634 may be placed above the mixing manifold extension block630. The mixing valve 634 may be secured to the mixing manifoldextension block 630 with a pressure sealer 622. Any fastening means,such as screws 624, may be used to secure the mixing valve 630 to thebase plate 606. The second section 656 of the mixing manifold extensionblock 630 may extend outwardly from the substrate 608 and be configuredto receive other gas delivery components.

Thus, extending the existing purge and mixing manifold is not necessaryas the secondary manifold in the extension block may replace the needfor a new manifold. This reduces the amount of material and cost to makethe single gas stick. Furthermore, the use of the extension blocksallows for the flexibility in adding and/or removing as many single gassticks as desired.

Although illustrated with the use of two extension blocks on one gasstick, it will now be known that other extension blocks may also bepositioned on the last gas stick of the gas panel 600.

FIGS. 7A and 7B illustrate yet another embodiment of an extension block.The extension block 700 may have a first section 702, a second section704, and a third section 706. Although illustrated with three sections,the number of sections is not intended to be limiting as the extensionblock may have a plurality of sections a desired. Each section may havean entrance port 708, an exit port 710, and a plurality of apertures 712for removably coupling the extension block to the base plate. Theentrance port 708 may be in fluid communication with a gas stickcomponent, such as the MFC, via the manifold block illustrated in FIGS.3C and 3D. The exit port 710 may be in fluid communication with a commonmanifold pathway 714 and the mixing manifold via the base plate (notillustrated).

The extension block 700 may also have a tubing port 716 positionedbetween each of the sections. As illustrated in FIGS. 7A and 7B, thetube port 716 is positioned between the first section 702 and the secondsection 704 and between the second section 704 and the third section706. The tube port 716 may be in fluid communication with the commonmanifold pathway 714.

The tube port 716 may be configured to receive a vertical tube or pipeable to be positioned between two of the gas delivery components, suchas between two mixing valves. There is currently no method in which toadd an additional component between two existing gas delivery componentsdue to the small real estate available on the gas stick. However, theuse of a vertical tube is possible and may be used as an additional testport to ensure the gas flow is proper, a sample port to insert samplegasses for testing, an extra purge port, and/or to reassign and/orredirect gas lines to reduce dead leg or redirect the flow of thegasses.

In one embodiment, the extension block 700 may be fluidly coupled to thegas panel as discussed above with reference to the exemplary embodimentsof extension blocks described above. Thus, sections of the extensionblock may extend outwardly from the gas panel to allow for the removableconnection to additional gas delivery components.

In another embodiment, the extension block may be used in place of themixing manifold 226. FIG. 8 illustrates a side view of one end of anexemplary gas panel. The gas panel 800 may have a plurality of gassticks 802 a, 802 b, 802 c, 802 n, each having a mixing valve 804 a, 804b, 804 c, 804 n. The mixing valves 804 a, 804 b, 804 c, 804 n, may be influid communication and removably coupled to the extension block 806having a first section 808, a second section 810, third section 812, afourth section 814, and an n-section 816. As illustrated, the n-section716 extends beyond the gas stick 800 to allow for the removableconnection of additional gas delivery components. Vertical tubes 820 a,820 b, 820 c, 820 n may extend upwardly from the extension block 806between each mixing valve 804 a, 804 b, 804 c, 804 n. Vertical tubes 820a, 820 b, 820 c, 820 n may be in fluid communication with a commonmanifold pathway 822 in the extension block 806. The common manifoldpathway 822 may replace the need for another mixing manifold. This wouldcreate a more efficient gas panel as less material would be required,the cost to manufacture is less, and there is less dead leg.

It will now be known to those skilled in the art that any number ofextension blocks may be used to allow for greater flexibility. Forexample, a single extension block may be used for gas sticks 802 b, 802c in the center of the gas panel. A second extension block may bepositioned on the first gas stick 802 a and a third extension block maybe use positioned on the last gas stick 802 n. Both extension blocks mayextend outwardly from the first gas stick 802 a and the last gas stick802 n to allow for the addition of additional gas delivery components.This allows for the flexibility and ease of removing or adding multiplesingle gas sticks to the existing gas panel.

FIG. 9 is a schematic view of an exemplary gas feed device forsemiconductor processing. A plasma processing chamber 910 is suppliedprocessing gas through gas supply line 914. The gas supply line 912 mayprovide process gas to a showerhead or other gas supply arrangementarranged in the upper portion of the chamber. Additionally, gas supplyline 914 may supply processing gas to a lower portion of the chambersuch as, for example, to a gas distribution ring surrounding thesubstrate holder or through gas outlets arranged in the substratesupport. However, an alternative dual gas feed arrangement can supplygas to the top center and top perimeter of the chamber. Processing gasmay be supplied to gas line 914 from gas supplies 916, 918, 920, 930 theprocess gasses from supplies 916, 918, 920, 930 being supplied to MFC922, 924, 926, 932 respectively. The MFC 922, 924, 926, 932 supply theprocess gasses to a mixing manifold 928 after which the mixed gas isdirected to gas flow line 914.

In operation, the user may select the fraction of mixed flow to bedelivered to the plasma processing chamber. For example, the user mightselect a flow of 250 sccm Ar/30 sccm C₄F_(8/)15 sccm C₄F_(6/)22 sccm O₂delivered through line 914. By comparing the total flow, which in thiscase could be measured by summing all of the flow readouts of the MFC922, 924, 926, 932 in the gas box, the controller can adjust the degreeof throttling in line 914 to achieve the desired flow distribution.Alternatively, an optional total flow meter could be installed justdownstream of the mixing manifold 928 to measure the total flow of mixedgas, rather than determining the total flow by summing the readouts ofthe MFCs 922, 924, 926, 932 in the gas box.

While this invention has been described in terms of several preferredembodiments, there are alterations, permutations, and various substituteequivalents, which fall within the scope of this invention. It shouldalso be noted that there are many alternative ways of implementing themethods and apparatuses of the present invention. It is thereforeintended that the following appended claims be interpreted as includingall such alterations, permutations, and various substitute equivalentsas fall within the true spirit and scope of the present invention.

1.-9. (canceled)
 10. A flexible gas delivery apparatus, comprising: atleast one gas stick positioned between a first gas stick and a last gasstick, each of the gas sticks having a plurality of gas deliverycomponents forming a gas panel; a plurality of manifold blocksinterconnected to form a substrate, each of the plurality of manifoldblocks coupled to each of the plurality of gas delivery components; abase plate having an upper surface and a lower surface, the uppersurface coupled to a bottom surface of the substrate; and a manifoldextension block, having: a plurality of input ports, each plurality ofinput ports in fluid communication with the substrate; a horizontalcommon manifold pathway; a plurality of output ports, each plurality ofoutput ports in fluid communication with the common manifold pathway;and a plurality of vertical tube ports configured to receive a tube,each of the plurality of vertical tube ports positioned substantiallybetween each of the plurality of input ports, each of the vertical tubeports in fluid communication with the common manifold pathway.
 11. Theapparatus of claim 10, wherein the manifold extension block extendsoutwardly from the gas panel to receive and be fluidly coupled to asingle gas stick.
 12. The apparatus of claim 10, further comprising amanifold coupled within the base plate to fluidly connect a plurality ofpurge valves in parallel.
 13. The apparatus of claim 12, wherein themanifold further comprises a first plurality of input/output ports influid communication with a second plurality of input/output ports in thesubstrate and wherein the second plurality of input/output ports on thebase plate are in fluid communication with a discharge port of theextension block.
 14. The apparatus of claim 10, wherein the first gasstick further comprises a first extension block having a first sectionand a second section, each section having an entrance port, exit port,and a discharge port, wherein the entrance port is in fluidcommunication with the substrate; wherein the discharge port of thefirst section is positioned between a purge valve and the substrate influid communication with a purge manifold; and wherein the secondportion of the first extension block extends outwardly from the gaspanel.
 15. The apparatus of claim 10, wherein the last gas stick furthercomprises a second extension block having a first section and a secondsection, each section having an entrance port, exit port, and adischarge port, wherein the entrance port is in fluid communication withthe substrate; wherein the discharge port of the first section ispositioned between a purge valve and the substrate in fluidcommunication with a purge manifold; and wherein the second portion ofthe first extension block extends outwardly from the gas panel.
 16. Theapparatus of claim 15, wherein the first extension and second extensionblocks further comprise a plurality of sections coupled to the secondsection.